JPH01134895A - 薄膜ｅｌパネル - Google Patents
薄膜ｅｌパネルInfo
- Publication number
- JPH01134895A JPH01134895A JP62293326A JP29332687A JPH01134895A JP H01134895 A JPH01134895 A JP H01134895A JP 62293326 A JP62293326 A JP 62293326A JP 29332687 A JP29332687 A JP 29332687A JP H01134895 A JPH01134895 A JP H01134895A
- Authority
- JP
- Japan
- Prior art keywords
- film
- auxiliary metal
- metal film
- transparent conductive
- panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 17
- 229910052751 metal Inorganic materials 0.000 claims abstract description 57
- 239000002184 metal Substances 0.000 claims abstract description 57
- 239000010408 film Substances 0.000 claims description 94
- 239000000758 substrate Substances 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 8
- 230000015556 catabolic process Effects 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 3
- 230000008719 thickening Effects 0.000 abstract 1
- 238000005401 electroluminescence Methods 0.000 description 19
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000010407 anodic oxide Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62293326A JPH01134895A (ja) | 1987-11-20 | 1987-11-20 | 薄膜ｅｌパネル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62293326A JPH01134895A (ja) | 1987-11-20 | 1987-11-20 | 薄膜ｅｌパネル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01134895A true JPH01134895A (ja) | 1989-05-26 |
| JPH0576155B2 JPH0576155B2 (en]) | 1993-10-22 |
Family
ID=17793378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62293326A Granted JPH01134895A (ja) | 1987-11-20 | 1987-11-20 | 薄膜ｅｌパネル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01134895A (en]) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05299177A (ja) * | 1992-04-22 | 1993-11-12 | Sharp Corp | 薄膜エレクトロ・ルミネッセンス素子 |
| US5445711A (en) * | 1992-06-11 | 1995-08-29 | Westinghouse Norden Systems | Low resistance, thermally stable electrode structure for electroluminescent displays |
| JP2001345185A (ja) * | 2000-03-27 | 2001-12-14 | Semiconductor Energy Lab Co Ltd | 発光装置およびその作製方法 |
| JP2002535822A (ja) * | 1999-01-22 | 2002-10-22 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 所定のセグメント化されたパターンを表示するエレクトロルミネッセント表示面体およびその製造方法 |
| KR100467391B1 (ko) * | 1996-03-12 | 2005-04-14 | 이데미쓰 고산 가부시키가이샤 | 유기전기발광소자및유기전기발광표시장치 |
| JP2008052154A (ja) * | 2006-08-28 | 2008-03-06 | Optrex Corp | 電子機器及び電子機器の製造方法 |
| US7393600B2 (en) | 2002-08-02 | 2008-07-01 | Idemitsu Kosan Co., Ltd. | Sputtering target, sintered article, conductive film fabricated by utilizing the same, organic EL device, and substrate for use therein |
| JP2010525539A (ja) * | 2007-04-27 | 2010-07-22 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 陽極酸化したメタライゼーションを伴う発光デバイス |
| WO2012014759A1 (en) * | 2010-07-26 | 2012-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device, lighting device, and manufacturing method of light-emitting device |
| JP2015135821A (ja) * | 2015-03-02 | 2015-07-27 | Ｎｅｃライティング株式会社 | 有機エレクトロルミネッセンス照明装置及びその製造方法 |
-
1987
- 1987-11-20 JP JP62293326A patent/JPH01134895A/ja active Granted
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05299177A (ja) * | 1992-04-22 | 1993-11-12 | Sharp Corp | 薄膜エレクトロ・ルミネッセンス素子 |
| US5445711A (en) * | 1992-06-11 | 1995-08-29 | Westinghouse Norden Systems | Low resistance, thermally stable electrode structure for electroluminescent displays |
| US5559399A (en) * | 1992-06-11 | 1996-09-24 | Norden Systems, Inc. | Low resistance, thermally stable electrode structure for electroluminescent displays |
| KR100467391B1 (ko) * | 1996-03-12 | 2005-04-14 | 이데미쓰 고산 가부시키가이샤 | 유기전기발광소자및유기전기발광표시장치 |
| EP1555856A3 (en) * | 1996-03-12 | 2010-09-22 | Idemitsu Kosan Company Limited | Organic electroluminescence element and organic electroluminescence display device |
| JP2002535822A (ja) * | 1999-01-22 | 2002-10-22 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 所定のセグメント化されたパターンを表示するエレクトロルミネッセント表示面体およびその製造方法 |
| JP2001345185A (ja) * | 2000-03-27 | 2001-12-14 | Semiconductor Energy Lab Co Ltd | 発光装置およびその作製方法 |
| US8093800B2 (en) | 2002-08-02 | 2012-01-10 | Idemitsu Kosan Co., Ltd. | Sputtering target, sintered article, conductive film fabricated by utilizing the same, organic EL device, and substrate for use therein |
| US7393600B2 (en) | 2002-08-02 | 2008-07-01 | Idemitsu Kosan Co., Ltd. | Sputtering target, sintered article, conductive film fabricated by utilizing the same, organic EL device, and substrate for use therein |
| JP2008052154A (ja) * | 2006-08-28 | 2008-03-06 | Optrex Corp | 電子機器及び電子機器の製造方法 |
| JP2010525539A (ja) * | 2007-04-27 | 2010-07-22 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 陽極酸化したメタライゼーションを伴う発光デバイス |
| WO2012014759A1 (en) * | 2010-07-26 | 2012-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device, lighting device, and manufacturing method of light-emitting device |
| JP2012049112A (ja) * | 2010-07-26 | 2012-03-08 | Semiconductor Energy Lab Co Ltd | 発光装置、照明装置及び発光装置の作製方法 |
| US8748930B2 (en) | 2010-07-26 | 2014-06-10 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device, lighting device, and manufacturing method of light-emitting device |
| JP2016035941A (ja) * | 2010-07-26 | 2016-03-17 | 株式会社半導体エネルギー研究所 | 発光装置 |
| US9728737B2 (en) | 2010-07-26 | 2017-08-08 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device, lighting device, and manufacturing method of light-emitting device |
| JP2015135821A (ja) * | 2015-03-02 | 2015-07-27 | Ｎｅｃライティング株式会社 | 有機エレクトロルミネッセンス照明装置及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0576155B2 (en]) | 1993-10-22 |
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